Elastically relaxed free-standing strained-silicon nanomembranes

TitleElastically relaxed free-standing strained-silicon nanomembranes
Publication TypeJournal Article
Year of Publication2006
AuthorsRoberts, Michelle M., Klein Levente J., Savage Donald E., Slinker Keith A., Friesen Mark, Celler George, Eriksson Mark A., and Lagally Max G.
JournalNature Materials
Volume5
Issue5
Pagination388 - 393
Date Published5/2006
ISSN1476-4660
KeywordsAnalytical chemistry
DOI10.1038/nmat1606
Short TitleNat Mater
Citation Key175

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