Silicon compounds: silicon tetrafluoride

silicon symbol icon

The silicon in silicon tetrafluoride formally is in the oxidation state 4.

Silicon tetrafluoride

  • Formula as often written: SiF4
  • Hill system formula: F4Si1
  • CAS registry number: [7783-61-1]
  • Formula weight: 104.079
  • Class: fluoride


  • silicon tetrafluoride
  • silicon(IV) fluoride
  • silicon fluoride
  • tetrafluorosilane

Physical properties

  • Colour: colourless
  • Appearance: gas
  • Melting point: -90°C
  • Boiling point: -86°C
  • Density: 4.6 kg dm-3 (gas)


Coming soon...

Element analysis

Element percentages for the elements in silicon tetrafluoride
Element %
F 73.02
Si 26.98


Not available

Isotope pattern

What follows is the calculated isotope pattern for the SiF4 unit with the most intense ion set to 100%.

Formula: Si1F4

mass  %
104 100.0 __________________________________________________
105 5.1 ___
106 3.4 __


The data on these compounds pages are assembled and adapted from the primary literature and several other sources including the following.

  • R.T. Sanderson in Chemical Periodicity, Reinhold, New York, USA, 1960.
  • N.N. Greenwood and A. Earnshaw in Chemistry of the Elements, 2nd edition, Butterworth, UK, 1997.
  • F.A. Cotton, G. Wilkinson, C.A. Murillo, and M. Bochmann, in Advanced Inorganic Chemistry, John Wiley & Sons, 1999.
  • A.F. Trotman-Dickenson, (ed.) in Comprehensive Inorganic Chemistry, Pergamon, Oxford, UK, 1973.
  • R.W.G. Wyckoff, in Crystal Structures, volume 1, Interscience, John Wiley & Sons, 1963.
  • A.R.West in Basic solid state chemistry Chemistry, John Wiley & Sons, 1999.
  • A.F. Wells in Structural inorganic chemistry, 4th edition, Oxford, UK, 1975.
  • J.D.H. Donnay, (ed.) in Crystal data determinative tables, ACA monograph number 5, American Crystallographic Association, USA, 1963.
  • D.R. Lide, (ed.) in Chemical Rubber Company handbook of chemistry and physics, CRC Press, Boca Raton, Florida, USA, 77th edition, 1996.
  • J.W. Mellor in A comprehensive treatise on inorganic and theoretical chemistry, volumes 1-16, Longmans, London, UK, 1922-1937.
  • J.E. Macintyre (ed.) in Dictionary of inorganic compounds, volumes 1-3, Chapman & Hall, London, UK, 1992.

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silicon atomic number